The Nanofabrication facility at Rome is located in a 500 square meters, 100-1000 class (ISO5 – ISO6) clean room. The facility is devoted to the fabrication of advanced optoelectronics components, microsystems and solid state devices and detectors. The core equipments include a wide range of fabrication (e-beam lithography, photolithography and thin-film technology) as well as nano-diagnostic tools. The objectives is set-up a facility allowing to support companies operating in the field of micro-nanoelectronics by providing several services: