Femtosecond laser micromachining of transparent materials is a rapidly expanding field that started in the late ’90s. It has evolved from an exotic phenomenological observation into a robust, flexible and powerful microfabrication technology, which produces devices that can compete with those fabricated by standard technologies. In addition, femtosecond laser micromachining has unique three-dimensional capabilities that enables unprecedented designs and device architectures.
The core idea behind this technology is nonlinear absorption. The extremely high intensity achieved in the focal volume of a focussed femtosecond laser pulse induces nonlinear phenomena such as multiphoton or tunneling ionization and avalanche ionization, thus producing a very localized deposit of energy in the volume of the material. Suitable motion of the sample can produce 3D modifications.
The basic devices that can be fabricated by this technology are optical waveguides and microfluidic channels (the latter requires a subsequent etching step). Further processing tasks that can be performed by this technology are: welding, cutting, surface texturing, etc. Combination of all these capabilities result extremely powerful in producing complex photonic and optofluidic devices that are also characterized in our labs.
PEOPLE INVOLVED:
Petra Paiè
Andrea Crespi
RESEARCH UNITS:
PUBLICATIONS
P. H. Dias Ferreira, V. Tribuzi, R. Osellame, F. Ghiglieno, “Improvement in measuring losses by interferometric technique for glass waveguides produced by femtosecond laser writing,” Optics Communications 530, 129132 (2023).
S. Haegele, G. Corrielli, M. Hejda, L. Duempelmann, R. A. Terborg, R. Osellame, V. Pruneri, “Large field‐of‐view holographic imager with ultra‐high phase sensitivity using multi‐angle illumination,” Optics and Lasers in Engineering 161, 107315 (2023).
V. Cimini, M. Valeri, E. Polino, S. Piacentini, F. Ceccarelli, G. Corrielli, N. Spagnolo, R. Osellame, F. Sciarrino, “Deep reinforcement learning for quantum multiparameter estimation,” Advanced Photonics 5, 016005 (2023).
F. Hoch, T. Giordani, N. Spagnolo, A. Crespi, R. Osellame, F. Sciarrino, “Characterization of multimode linear optical networks,” Advanced Photonics Nexus 2, 016007 (2023).
C. Testa, S. Oliveto, E. Jacchetti, F. Donnaloja, C. Martinelli, P. Pinoli, R. Osellame, G. Cerullo, S. Ceri, S. Biffo, M. T. Raimondi, “Whole transcriptomic analysis of mesenchymal stem cells cultured in Nichoid micro-scaffolds,” Frontiers in Bioengineering and Biotechnology 10, 945474 (2023).
A. Ahmad, F. Sala, P. Paiè, A. Candeo, S. D’Annunzio, A. Zippo, C. Frindel, R. Osellame, F. Bragheri, A. Bassi, D. Rousseau, “On the robustness of machine learning algorithms toward microfluidic distortions for cell classification via on-chip fluorescence microscopy,” Lab Chip 22, 3453-3463 (2022).
C. Pentangelo, F. Ceccarelli, S. Piacentini, S. Atzeni, A. Crespi, R. Osellame, “Low-power programmable integrated photonic circuits fabricated by femtosecond laser micromachining,” Il Nuovo Cimento C 45, 1-4 (2022).
M. Calvarese, P. Paiè, F. Ceccarelli, F. Sala, A. Bassi, R. Osellame, F. Bragheri, “Strategies for improved temporal response of glass-based optical switches,” Scientific Reports 12, 239 (2022).
R. Memeo, M. Bertaso, R. Osellame, F. Bragheri, A. Crespi, “Laser-Assisted Etching of EagleXG Glass by Irradiation at Low Pulse-Repetition Rate,” Applied Science 12, 948 (2022).
A. G. Ciriolo, R. Martínez Vázquez, G. Crippa, M. Devetta, A. Frezzotti, D. Comelli, G. Valentini, R. Osellame, C. Vozzi, S. Stagira, “Time-resolved imaging of femtosecond laser-induced plasma expansion in a nitrogen microjet,” Applied Science 12, 1978 (2022).
V. Zega, L. Pertoldi, T. Zandrini, R. Osellame, C. Comi, A. Corigliano, “Microstructured Phononic Crystal Isolates from Ultrasonic Mechanical Vibrations,” Applied Science 12, 2499 (2022).
S. E. D’Aurelio, M. Valeri, E. Polino, V. Cimini, I. Gianani, M. Barbieri, G. Corrielli, A. Crespi, R. Osellame, F. Sciarrino, N. Spagnolo, “Experimental investigation of Bayesian bounds in multiparameter estimation,” Quantum Science and Technology 7, 025011 (2022).
R. Martínez Vázquez, A. G. Ciriolo, G. Crippa, V. Tosa, F. Sala, M. Devetta, C. Vozzi, S. Stagira, R. Osellame, “Femtosecond laser micromachining of integrated glass devices for high‐order harmonic generation,” International Journal of Applied Glass Science 13, 162-170 (2022).
C. Conci, E. Jacchetti, L. Sironi, L. Gentili, G. Cerullo, R. Osellame, G. Chirico, M. T. Raimondi, “A miniaturized imaging window to quantify intravital tissue regeneration within a 3D microscaffold in longitudinal studies,” Advanced Optical Materials 10, 2101103 (2022).
M. Spagnolo, J. Morris, S. Piacentini, M. Antesberger, F. Massa, A. Crespi, F. Ceccarelli, R. Osellame, P. Walther, “Experimental photonic quantum memristor,” Nature Photonics 16, 318-323 (2022).
F. Hoch, S. Piacentini, T. Giordani, Z.-N. Tian, M. Iuliano, C. Esposito, A. Camillini, G. Carvacho, F. Ceccarelli, N. Spagnolo, A. Crespi, F. Sciarrino, R. Osellame, “Reconfigurable continuously-coupled 3D photonic circuit for Boson Sampling experiments,” npj Quantum Information 8, 55 (2022).
F. Sala, C. Ficorella, R. Osellame, J.A. Käs, R. Martínez Vázquez, “Microfluidic Lab-on-a-Chip for Studies of Cell Migration under Spatial Confinement,” Biosensors 12, 604 (2022).
C. A. Musi, L. Colnaghi, A. Giani, E. C. Priori, G. Marchini, M. Tironi, C. Conci, G. Cerullo, R. Osellame, M. T. Raimondi, A. Remuzzi, T. Borsello, “Effect of 3D Synthetic Microscaffold Nichoid on the Morphology of Cultured Hippocampal Neurons and Astrocytes,” Cells 11, 2008 (2022).
J. V. Rakonjac, G. Corrielli, D. Lago-Rivera, A. Seri, M. Mazzera, S. Grandi, R. Osellame, H. de Riedmatten, “Storage and analysis of light-matter entanglement in a fiber-integrated system,” Science Advances 8, eabn3919 (2022).
V. G. Lucivero, A. Zanoni, G. Corrielli, R. Osellame, M. W. Mitchell, “Laser-written vapor cells for chip-scale atomic sensing and spectroscopy,” Optics Express 30, 27149-27163 (2022).
R. Albiero, C. Pentangelo, M. Gardina, S. Atzeni, F. Ceccarelli, R. Osellame, “Toward higher integration density in femtosecond-laser-written programmable photonic circuits,” Micromachines 13, 1145 (2022).
M. Calvarese, P. Paiè, A. Candeo, G. Calisesi, F. Ceccarelli, G. Valentini, R. Osellame, H. Gong, M. Neil, F. Bragheri, A. Bassi, “Integrated optical device for Structured Illumination Microscopy,” Optics Express 30, 30246-30259 (2022).
M. Pont, R. Albiero, S. E. Thomas, N. Spagnolo, F. Ceccarelli, G. Corrielli, A. Brieussel, N. Somaschi, H. Huet, A. Harouri, A. Lemaître, I. Sagnes, N. Belabas, F. Sciarrino, R. Osellame, P. Senellart, A. Crespi, “Quantifying n-Photon Indistinguishability with a Cyclic Integrated Interferometer,” Physical Review X 12, 031033 (2022).
S. Piacentini, F. Bragheri, G. Corrielli, R. Martínez Vázquez, P. Paiè, R. Osellame, “Advanced photonic and optofluidic devices fabricated in glass via femtosecond laser micromachining,” Optical Materials Express 12, 3930-3945 (2022). Invited paper.
E. Mogni, G. Pellegrini, J. Gil‐Rostra, F. Yubero, G. Simone, S. Fossati, J. Dostálek, R. Martínez Vázquez, R. Osellame, M. Celebrano, M. Finazzi, P. Biagioni, “One‐Dimensional Photonic Crystal for Surface Mode Polarization Control,” Advanced Optical Materials 10, 2200759 (2022).
A. G. Ciriolo, R. Martínez Vázquez, G. Crippa, M. Devetta, D. Faccialà, P. Barbato, F. Frassetto, M. Negro, F. Bariselli, L. Poletto, V. Tosa, A. Frezzotti, C. Vozzi, R. Osellame, S. Stagira, “Microfluidic devices for quasi-phase-matching in high-order harmonic generation,” APL Photonics 7, 110801 (2022).
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- M. Valeri, E. Polino, D. Poderini, I. Gianani, G. Corrielli, A. Crespi, R. Osellame, N. Spagnolo, and F. Sciarrino, “Experimental adaptive Bayesian estimation of multiple phases with limited data,” npj Quantum Information 6, 92 (2020).
- L. Pertoldi, V. Zega, C. Comi, R. Osellame, “Dynamic mechanical characterization of two-photon-polymerized SZ2080 photoresist,” Journal of Applied Physics 128, 175102 (2020).
- V. Parodi, E. Jacchetti, A. Bresci, B. Talone, C. M. Valensise, R. Osellame, G. Cerullo, D. Polli, and M.T. Raimondi, “Characterization of Mesenchymal Stem Cell Differentiation within Miniaturized 3D Scaffolds through Advanced Microscopy Techniques,” Int. J. Mol. Sci. 21, 8498 (2020).
- F. Ceccarelli, S. Atzeni, C. Pentangelo, F. Pellegatta, A. Crespi, and R. Osellame, “Low Power Reconfigurability and Reduced Crosstalk in Integrated Photonic Circuits Fabricated by Femtosecond Laser Micromachining,” Laser Photonics Rev. 14, 2000024 (2020).
- V. Parodi, E. Jacchetti, R. Osellame, G. Cerullo, D. Polli, and M. T. Raimondi, “Nonlinear Optical Microscopy: From Fundamentals to Applications in Live Bioimaging,” Front. Bioeng. Biotechnol. 8, 585363 (2020).
- M. Spagnolo, R. Motta, R. Memeo, F. Pellegatta, A. Crespi, and R. Osellame, “Resonant opto-mechanical modulators and switches by femtosecond laser micromachining,” Opt. Express 28, 23133-23142 (2020).
- A. Remuzzi, B. Bonandrini, M. Tironi, L. Longaretti, M. Figliuzzi, S. Conti, T. Zandrini, R. Osellame, G. Cerullo, and M. T. Raimondi, “Effect of the 3D Artificial Nichoid on the Morphology and Mechanobiological Response of Mesenchymal Stem Cells Cultured In Vitro,” Cells 9, 1873 (2020).
- H. Ahmadi, S. Kellerer, D. Ertel, M. Moioli, M. Reduzzi, P. K. Maroju, A. Jäger, R. N. Shah, J. Lutz, F. Frassetto, L. Poletto, F. Bragheri, R. Osellame, T. Pfeifer, C. D. Schröter, R. Moshammer, and G. Sansone, “Collinear setup for delay control in two-color attosecond measurements,” J. Phys. Photonics 2, 024006 (2020).
- F. Sala, M. Castriotta, P. Paiè, A. Farina, S. D’Annunzio, A. Zippo, R. Osellame, F. Bragheri, and A. Bassi, “High-throughput 3D imaging of single cells with light-sheet fluorescence microscopy on chip,” Biomed. Opt. Express 11, 4397-4407 (2020).
- A. G. Ciriolo, R. Martínez Vázquez, V. Tosa, A. Frezzotti, G. Crippa, M. Devetta, D. Faccialá, F. Frassetto, L. Poletto, A. Pusala, C. Vozzi, R. Osellame, and S Stagira, “High-order harmonic generation in a microfluidic glass device,” J. Phys. Photonics 2, 024005 (2020).
- V. Vitali, G. Nava, G. Zanchetta, F. Bragheri, A. Crespi, R. Osellame, T. Bellini, I. Cristiani, and P. Minzioni, “Integrated Optofluidic Chip for Oscillatory Microrheology,” Scientific Reports 10, 5831 (2020).
- A. G. Ciriolo, R. Martínez Vázquez, A. Roversi, A. Frezzotti, C. Vozzi, R. Osellame, and S. Stagira, “Femtosecond Laser-Micromachining of Glass Micro-Chip for High Order Harmonic Generation in Gases,” Micromachines 11, 165 (2020).
